Facilities
Measurement systems
Dry 14-T ULT system
ICEOxford, Base T: 100 mK or 1.5 K
Location: CYP LG208
Book
Dry 12-T ULT system
Lakeshore (Janis)
He3 probe from Multifields Tech.
Base T: 300 mK or 1.5 K
Location: CYP 312A
Dry 9-T PPMS
Quantum Design, Base T: 1.8 K
ETO, TTO, VSM & vdP modules
Location: CYP 312A
Book
Dry 7-T Cryostat
Oxford, Base T: ~6 K
Location: CYP 206D
Dry 10 K CCR Cryostat
Location: CYP 312A
Three Omega Measurement System
TEC control, Home-made
Location: CYP 312A
Thermoelectric Probe Station in Glove box
TEC control, Home-made
Location: CYP 312A
Thermoelectric Microprobing System
in Glove box, Home made
Location: CYP LG208
Probe Station
Yingbo Science & Instrument
Location: CYP LG208
Nano-fabrication
E-beam writer
TESCAN MIRA 3 with ELPHY Plus
Location: CYP LG208
Book
Scanning Electron Microscope
JSM-7001F with ELPHY quantum
Location: CYP 206
Mask-free lithography system
ML3 from Durham Magneto Optics
Location: CYP 312A
Book
E-beam induced thermal evaporator
Korvus technology
4 pockets, in-situ Ar-ion etching
Location: CYP 312A
Book
E-beam evaporator
Repaired AUTO360, 4 pockets
Thermal evaporation included
Location: CYP 312A
Sputtering System
Repaired, Two DC and one RF
AlOx, NiFe, and Nb3Ge
Location: CYP 312A
Mini plasma sputtering coater
EMS, Au or AuPd target
Location: CYP 312A
Thermal evaporator
One source
Location: CYP 312A
RIE etcher (CF4, O2, and Ar)
PVA TePla IoN 3B
Location: CYP 312A
UV Ozone Cleaner
Ossila
Location: CYP 312A
RTA and CVD Furnace
Three gas inputs
80 mm tube, Turbo pump
Location: CYP LG208
Nano-engineering/characterization
Glove box on an optical table
Yeada Group, 3 gloves
Location: CYP 312A
Fully-motorized transfer system in Glove box
Standa xyz-xyr, Nikon
Location: CYP 312A
AFM in Glove box
Nanosurf, FlexAFM
Location: CYP 312A
AFM in air
NanoMagnetics, ezAFM+
KPFM, Lithography mode
Location: CYP 312A
Fully-motorized transfer system
Standa xyz-xyr, Koppace
Location: CYP 312A
Semi-motorized transfer system
Standa xyz-r, Nikon
Location: CYP 312A
Manual transfer system I
Standa r stage, Zoom microscope
Location: CYP 312A
Manual transfer system II
Modified contact aligner
Location: CYP 312A
Raman/PL spectrometer
XploRA Plus
Location: CYP LG208
Contact profiler
D-300, KLA
Location: CYP LG208
Nikon microscope
with XY position display
Location: CYP 312A
Fundings
We are grateful for generous supports by:
RGC Collaborative Research Fund (CRF) Group Research Grant
RGC Collaborative Research Fund (CRF) Equipment Grant
RGC Area of Excellence (AoE)
MoST National Key Research and Development Program
RGC General Research Fund (GRF)
RGC Early Career Scheme (ECS)
Start-up and Various Seed Funds from HKU
