Facilities

Measurement systems

Dilution

Dry 14-T ULT system
ICEOxford, Base T: 100 mK or 1.5 K
Location: CYP LG208
Book

He3

Dry 12-T ULT system
Lakeshore (Janis)
Base T: 300 mK or 1.5 K
Location: CYP 312A

PPMS

Dry 9-T PPMS
Quantum Design, Base T: 1.8 K
ETO, TTO, VSM & vdP modules
Location: CYP 312A
Book

7T

Dry 7-T Cryostat
Oxford, Base T: ~6 K
Location: CYP 206D

10K

Dry 10 K CCR Cryostat
Location: CYP 312A

RT

Three Omega Measurement System
TEC control, Home-made
Location: CYP 312A

TEP

Thermoelectric Probe Station in Glove box
TEC control, Home-made
Location: CYP 312A

TEP tip

Thermoelectric Microprobing System
in Glove box, Home made
Location: CYP LG208

Probe1

Probe Station I
Yingbo Science & Instrument
Location: CYP LG208

Probe2

Probe Station II
Sample in vacuum, 20-pin socket
4155A Semiconductor Analyzer
Location: CYP 312A

Nano-fabrication

E-beam writer

E-beam writer
TESCAN MIRA 3 with ELPHY Plus
Location: CYP LG208
Book

JEOL

Scanning Electron Microscope
JSM-7001F with ELPHY quantum
Location: CYP 206

Laser writer

Mask-free lithography system
ML3 from Durham Magneto Optics
Location: CYP 312A
Book

EBE

E-beam induced thermal evaporator
Korvus technology
4 pockets, in-situ Ar-ion etching
Location: CYP 312A
Book

EBE1

E-beam evaporator
Repaired AUTO360, 4 pockets
Thermal evaporation included
Location: CYP 312A

Sputtering

Sputtering System
Repaired, Two DC and one RF
AlOx, NiFe, and Nb3Ge
Location: CYP 312A

Gold coater

Mini plasma sputtering coater
EMS, Au or AuPd target
Location: CYP 312A

Thermal Evap

Thermal evaporator
One source
Location: CYP 312A

RIE

RIE etcher (CF4, O2, and Ar)
PVA TePla IoN 3B
Location: CYP 312A

ozone

UV Ozone Cleaner
Ossila
Location: CYP 312A

RTA1

RTA and CVD Furnace
Three gas inputs
80 mm tube, Turbo pump
Location: CYP LG208

Nano-engineering/characterization

Transfer

Glove box on an optical table
Yeada Group, 3 gloves
Location: CYP 312A

Transfer

Fully-motorized transfer system in Glove box
Standa xyz-xyr, Nikon
Location: CYP 312A

AFM

AFM in Glove box
Nanosurf, FlexAFM
Location: CYP 312A

AFM1

AFM in air
NanoMagnetics, ezAFM+
KPFM, Lithography mode
Location: CYP 312A

Full

Fully-motorized transfer system
Standa xyz-xyr, Koppace
Location: CYP 312A

Semi

Semi-motorized transfer system
Standa xyz-r, Nikon
Location: CYP 312A

Transfer

Manual transfer system I
Standa r stage, Zoom microscope
Location: CYP 312A

Transfer

Manual transfer system II
Modified contact aligner
Location: CYP 312A

Raman

Raman/PL spectrometer
XploRA Plus
Location: CYP LG208

Stylus

Contact profiler
D-300, KLA
Location: CYP LG208

Microscope

Nikon microscope
with XY position display
Location: CYP 312A

Fundings

We are grateful for generous supports by:


RGC Collaborative Research Fund (CRF) Group Research Grant
RGC Collaborative Research Fund (CRF) Equipment Grant
RGC Area of Excellence (AoE)
MoST National Key Research and Development Program
RGC General Research Fund (GRF)
RGC Early Career Scheme (ECS)
Start-up and Various Seed Funds from HKU


MoST


UGC


HKU